-
Product Feature
- Composed of 2 to 12-inch wafers + thermocouples (TC Wafer)
- Accurately measures the equipment platform temperature
- Multi-point distribution measurement for temperature uniformity (1~34 points) / heating rate up to 35℃/s
- Temperature range: -200~1250℃
- Calibrated by a third-party laboratory authorized by an international laboratory accreditation (ILAC) based on TAF/ANAB standards
- Flexible customization options available
- Data can be transmitted to a PC via wired/wireless recorder
Calibration Servic
- ILAC / ANAB Certification Service
- The third-party laboratory has over 50 years of knowledge and experience, utilizing a global network of ISO 17025-certified NIST traceable calibration laboratories and support offices.
- Streamline your calibration workflow with industry-leading calibration services and solutions.
-
- ✧ A customized temperature measurement tool designed to ensure the quality of your products.
✧ Our professional development team has extensive process experience and expertise in measurement tool validation and manufacturing
Premtek independently develops thermocouple temperature sensors (Thermocouple Wafer), which are calibrated by a third-party laboratory authorized by the ILAC based on TAF/ANAB standards. The product features one or multiple temperature sensing points on the wafer surface, allowing precise measurement of specific locations. This enables users to calibrate process equipment according to standardized measurements while monitoring temperature uniformity in the environment.
Main Applications：RTP、OVEN、REFLOW、HOT PLATE、CVD、PVD、SPUTTERING、OTHER PROCESS
- ✧ A customized temperature measurement tool designed to ensure the quality of your products.
-
Product Composition
Application Wire group Spec (mm) L2 wire material L1 L2 L3 RTP 1 300 100 600 polyimide 2 600 100 600 Reflow 3 0 300 500 teflon 4 1000 0 0 5 6000 0 0 CVD/PVD 6 300 150 1000 polyimide 7 700 400 1000 Oven 8 1000 300 2000 teflon 9 2000 300 2000 Coater/Hot plate 10 200 200 2000 polyimide 11 2000 200 1800 12 500 100 1000 
Type Diameter (mm) Working Temperature (°C) Accuracy R/S 0.127 1200 ±1.5°C or ±0.25% (MT) 0.254 1250 K 0.127 700 ±1.1°C or ±0.4% (MT) 0.3 900 T 0.127 400 ±0.5°C or ±0.1% (MT)
-
Thermocouple Wafer /TCW
Product Feature
- Composed of 2 to 12-inch wafers + thermocouples (TC Wafer)
- Accurately measures the equipment platform temperature
- Multi-point distribution measurement for temperature uniformity (1~34 points) / heating rate up to 35℃/s
- Temperature range: -200~1250℃
- Calibrated by a third-party laboratory authorized by an international laboratory accreditation (ILAC) based on TAF/ANAB standards
- Flexible customization options available
- Data can be transmitted to a PC via wired/wireless recorder
Calibration Servic
- ILAC / ANAB Certification Service
- The third-party laboratory has over 50 years of knowledge and experience, utilizing a global network of ISO 17025-certified NIST traceable calibration laboratories and support offices.
- Streamline your calibration workflow with industry-leading calibration services and solutions.
-
Product Description
- ✧ A customized temperature measurement tool designed to ensure the quality of your products.
✧ Our professional development team has extensive process experience and expertise in measurement tool validation and manufacturing
Premtek independently develops thermocouple temperature sensors (Thermocouple Wafer), which are calibrated by a third-party laboratory authorized by the ILAC based on TAF/ANAB standards. The product features one or multiple temperature sensing points on the wafer surface, allowing precise measurement of specific locations. This enables users to calibrate process equipment according to standardized measurements while monitoring temperature uniformity in the environment.
Main Applications：RTP、OVEN、REFLOW、HOT PLATE、CVD、PVD、SPUTTERING、OTHER PROCESS
- ✧ A customized temperature measurement tool designed to ensure the quality of your products.
-
Standard Specification Options
Product Composition
Application Wire group Spec (mm) L2 wire material L1 L2 L3 RTP 1 300 100 600 polyimide 2 600 100 600 Reflow 3 0 300 500 teflon 4 1000 0 0 5 6000 0 0 CVD/PVD 6 300 150 1000 polyimide 7 700 400 1000 Oven 8 1000 300 2000 teflon 9 2000 300 2000 Coater/Hot plate 10 200 200 2000 polyimide 11 2000 200 1800 12 500 100 1000 Type Diameter (mm) Working Temperature (°C) Accuracy R/S 0.127 1200 ±1.5°C or ±0.25% (MT) 0.254 1250 K 0.127 700 ±1.1°C or ±0.4% (MT) 0.3 900 T 0.127 400 ±0.5°C or ±0.1% (MT)
