Professional RTP equipment：
For SiC / Silicon / GaN / GaAs / InP
Solutions for Your Products：
AI Servers / Power Discrete Applications
Optical Applications / Micro LEDs / CPO (CW Lasers and Photodiodes)
Communication / RF & Power Amplifier Applications
Automotive / Power Device Applications
Process Applications
Ohmic / Schottky contact
Ion-implantation treatment
Metal silicide formation
PBSG/PSG reflow
Dopant activation
ITO film activation
Wafer manufacturing
Product Features
Supports both 8” & 6” wafer production
Fully automatic wafer handling
Configurable SMIF / Open cassette load port
Compatible with both atmospheric / Vacuum process
Double-sided heating with lamp arrays
Customer Benefits
Proven performance in mass production
Oxygen-free processing with O2 < 1 ppm
Excellent wafer uniformity
High throughput with wafer in / out
SECS / GEM communication ready
Compliant with SEMI-S2/CE standards
Fully Automated Rapid Thermal Processing (RTP) System
RTP-1200A(S)
*GaAs/InP total solutions
Fully automated annealing system supporting wafer sizes up to 6 inches and below. Designed to meet customers' production requirements for small-size wafer applications.
RTP-1200A(SEC)
*Major installed base in SiC & GaN
Fully automated wafer processing system supporting 6- to 8-inch wafers. Equipped with a SMIF Load Port interface and proven through extensive field installations, it has become a key solution for capacity expansion in the compound semiconductor industry across Asia.
RTP-2200A(SEC)
*Si-base implanted diffusion control
*Dual-chamber
Fully automated wafer processing system featuring rapid heating and cooling performance for improved silicon diffusion process control. The dual-chamber design enables higher throughput and increased production capacity.
Semi-Automated Rapid Thermal Processing (RTP) System
Semi-Automatic RTP
Premtek offers semi-automatic RTP systems perfect for small-scale production lines, R&D, and process monitoring. By changing different types of susceptors, the process chamber accommodates wafers ranging from 2 to 12 inches, providing flexibility for various applications.
Desktop RTP
For universities, laboratories, and R&D centers, the Premtek Desktop RTP system offers a cost-effective, fully manual solution compatible with 2 to 6-inch wafers. Simple, efficient, and designed to meet the needs of researchers globally.
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