For SiC / Silicon / GaN / GaAs
compound annealing
The Premtek RTP-1200A (SEC) is a fully automated Rapid Thermal Processing (RTP) system designed for 8-inch wafers. Engineered for precision, it features a high-uniformity processing chamber with multi-zone SCR control, ensuring optimal process results. The EFEM system can be configured with either SMIF(*1) or open cassette load ports, this versatile system caters to various production needs.
With numerous certifications and successful installations across diverse production lines, our RTP solutions are trusted by industry leaders.
Our Lab center allows potential users to conduct sample testing before evaluation or making a purchase decision. Premtek also offers annealing process solutions for a wide range of substrate applications, including power device such as Ni-salicide, Ti-silicide, and ion implantation activation. We process deep expertise in power device, including SiC/Si MOSFET, SBD, and GaN HEMTs.
(*1) SMIF load port option: RTP - 1200A (SEF)
Process Applications
- Ohmic / Schottky contact
- Ion-implantation treatment
- Metal silicide formation
- PBSG/PSG reflow
- Dopant activation
- ITO film activation
- Wafer manufacturing
Product Features
- Supports both 8” & 6” wafer production
- Fully automatic wafer handling
- Configurable SMIF / Open cassette load port
- Compatible with both atmospheric / Vacuum process
- Double-sided heating with lamp arrays
Customer Benefits
- Proven performance in mass production
- Oxygen-free processing with O2 < 1 ppm
- Excellent wafer uniformity
- High throughput with wafer in / out
- SECS / GEM communication ready
- Compliant with SEMI-S2/CE standards
Premtek offers semi-automatic RTP systems perfect for small-scale production lines, R&D, and process monitoring. By changing different types of susceptors, the process chamber accommodates wafers ranging from 2 to 12 inches, providing flexibility for various applications.
As Asia's leading RTP brand, with over 500 units installed, Premtek brings extensive application experience across markets, including monitoring implanters, GaAs/InP substrates, ITO film production, and emerging technologies like Micro LED.
For universities, laboratories, and R&D centers, the Premtek Desktop RTP system offers a cost-effective, fully manual solution compatible with 2 to 6-inch wafers. Simple, efficient, and designed to meet the needs of researchers globally.
If you have any procurement needs related to RTP, please leave the following relevant information or contact us by phone.
If you have any questions, suggestions, or simply wish to get in touch with us, we are more than happy to hear from you!
